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Start Session
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| Date | May 14, 2008 |
| Time | 10:00AM - 11:30AM (HK Time) |
| Scope | Seminar Start Time:
| 10:00 AM | | Beijing/Taipei time |
| 10:00 AM | | Singapore/Kuala Lumpur/Manila time |
| 11:00 AM | | Seoul time |
| 12:00 Noon | | Sydney time |
A new "smart" algorithm is developed for automatic monitoring of gate dielectric during Constant Voltage Sweep stressing with interlaced characterization using Stress Induced Leakage Current (SILC). In this approach, SILC data is collected automatically based on changes in measured stress current, and/or time intervals. This fully automated test was implemented using the Keithley 2600 Series SourceMeter, and applied to study degradation of the transistor TiN/HfO2 gate stacks. |
| Sponsor | Keithley Instruments, Inc. www.keithley.com
With more than 60 years of measurement expertise, Keithley Instruments has become a world leader in advanced electrical test instruments and systems from DC to RF (radio frequency). Our products solve emerging measurement needs in production testing, process monitoring, product development, and research. Our customers are scientists and engineers in the worldwide electronics industry involved with advanced materials research, semiconductor device development and fabrication, and the production of end products such as portable wireless devices. The value we provide them is a combination of precision measurement technology and a rich understanding of their applications to improve the quality of their products and reduce their cost of test. |
| Expert | Dr. Chadwin D. Young
Project Engineer
SEMATECH Inc.
Dr. Steven Weinzierl
Application Manager
Keithley Instruments, Inc.
Cheong Siong Keat
Senior Application Engineer
Keithley Instruments, Inc.
Please click here for the profiles of the experts |
| Language | The presentation will be in English and the experts will answer questions verbally in English. Participants can send in questions during the presentation and Q&A sessions in English text. |
| Remarks | If you sign up for this session, we may share your member profile information (except login name and password) with Keithley Instruments for improving the content for future seminars. If you do not wish this information to be shared with Keithley Instruments, please exit now from this registration page.
Participants will be entitled to enter our lucky draw for an iPod nano after attending the live session and submitting the feedback forms. |
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